Si1−xGex selective epitaxial growth for ultra-high-speed self-aligned HBTs
| Autor: | Oda, Katsuya *, Ohue, Eiji, Tanabe, Masamichi, Shimamoto, Hiromi, Washio, Katsuyoshi |
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| Zdroj: | In Thin Solid Films 3 July 2000 369(1-2):358-361 |
| Databáze: | ScienceDirect |
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