Combined thermo-physical investigations of thin layers with Time Domain Thermoreflectance and Scanning Thermal Microscopy on the example of 500 nm thin, CVD grown tungsten
| Autor: | Fladischer, Katrin, Leitgeb, Verena, Mitterhuber, Lisa, Maier, Günther A., Keckes, Jozef, Sagmeister, Martin, Carniello, Sara, Defregger, Stefan |
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| Zdroj: | In Thermochimica Acta November 2019 681 |
| Databáze: | ScienceDirect |
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