Angular distribution of particles sputtered from III–V compound semiconductors by Ar +-ion bombardment
| Autor: | Tanemura, M *, Ukita, M, Okuyama, F |
|---|---|
| Zdroj: | In Surface Science 1999 426(2):141-146 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Tanemura, M *, Ukita, M, Okuyama, F |
|---|---|
| Zdroj: | In Surface Science 1999 426(2):141-146 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect