Theoretical investigation of NH3 nitridation on Cl-terminated Si(100)-2 × 1 surfaces
| Autor: | Nagahashi, Tomoya, Karasawa, Hajime, Horiike, Ryota, Shiraishi, Kenji |
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| Zdroj: | In Surface Science March 2025 753 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Nagahashi, Tomoya, Karasawa, Hajime, Horiike, Ryota, Shiraishi, Kenji |
|---|---|
| Zdroj: | In Surface Science March 2025 753 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect