In-situ non-disruptive cleaning of Ge(100) using H2O2(g) and atomic hydrogen

Autor: Kaufman-Osborn, Tobin, Kiantaj, Kiarash, Chang, Chorng-Ping, Kummel, Andrew C.
Zdroj: In Surface Science December 2014 630:254-259
Databáze: ScienceDirect