Adsorption mechanisms of fluorocarbon polymers at ultra low- k surfaces
| Autor: | Leitsmann, R., Böhm, O., Plänitz, Ph., Radehaus, C., Schaller, M., Schreiber, M. |
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| Zdroj: | In Surface Science 2010 604(19):1808-1812 |
| Databáze: | ScienceDirect |
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| Autor: | Leitsmann, R., Böhm, O., Plänitz, Ph., Radehaus, C., Schaller, M., Schreiber, M. |
|---|---|
| Zdroj: | In Surface Science 2010 604(19):1808-1812 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect