Interaction of SiH x precursors with hydrogen-covered Si surfaces: Impact dynamics and adsorption sites
| Autor: | Cereda, S., Montalenti, F., Miglio, Leo |
|---|---|
| Zdroj: | In Surface Science 2007 601(18):3970-3973 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Cereda, S., Montalenti, F., Miglio, Leo |
|---|---|
| Zdroj: | In Surface Science 2007 601(18):3970-3973 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect