Investigating the lateral motion of SiGe islands by selective chemical etching

Autor: Katsaros, G., Rastelli, A., Stoffel, M., Isella, G., Känel, H. von, Bittner, A.M., Tersoff, J., Denker, U., Schmidt, O.G., Costantini, G., Kern, K.
Zdroj: In Surface Science 2006 600(12):2608-2613
Databáze: ScienceDirect