Nucleation kinetics versus nitrogen partial pressure during homoepitaxial growth of stoichiometric TiN(0 0 1): A scanning tunneling microscopy study
| Autor: | Wall, Marcel A., Cahill, David G., Petrov, I., Gall, D., Greene, J.E. |
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| Zdroj: | In Surface Science 2005 581(2):L122-127 |
| Databáze: | ScienceDirect |
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