The combined study of the organosilicon films by RBS, ERDA and AFM analytical methods obtained from PECVD and PACVD
| Autor: | Mackova, A., Perina, V., Stryhal, Z., Pavlik, J., Svec, M., Quédé, A., Supiot, P., Borvon, G., Granier, A., Raynaud, P. |
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| Zdroj: | In Surface Science 2004 566 Part 2:1143-1146 |
| Databáze: | ScienceDirect |
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