Soft breakdown in very thin Ta 2O 5 gate dielectric layers
| Autor: | Houssa, M *, Mertens, P.W, Heyns, M.M, Jeon, J.S, Halliyal, A, Ogle, B |
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| Zdroj: | In Solid State Electronics 2000 44(3):521-525 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Houssa, M *, Mertens, P.W, Heyns, M.M, Jeon, J.S, Halliyal, A, Ogle, B |
|---|---|
| Zdroj: | In Solid State Electronics 2000 44(3):521-525 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect