Improved reliability of wet oxidized nitride MOS capacitors in comparison to RTP N 2O oxidized nitride films
| Autor: | Mazumder, Motaharul Kabir, Kobayashi, Kiyoteru, Ogata, Tamotsu, Mitsuhashi, Jun-Ichi, Mashiko, Yoji, Kawazu, Satoru, Sekine, Masahiro, Koyama, Hiroshi, Yasuoka, Akihiko |
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| Zdroj: | In Solid State Electronics 1997 41(5):749-755 |
| Databáze: | ScienceDirect |
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