High-resistivity with PN interface passivation in 22 nm FD-SOI technology for low-loss passives at RF and millimeter-wave frequencies
| Autor: | Nyssens, L., Rack, M., Nabet, M., Schwan, C., Zhao, Z., Lehmann, S., Herrmann, T., Henke, D., Kondrat, A., Soonekindt, C., Koch, F., Kache, T., Kini, D.P., Zimmerhackl, O., Allibert, F., Aulnette, C., Lederer, D., Raskin, J.-P. |
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| Zdroj: | In Solid State Electronics July 2023 205 |
| Databáze: | ScienceDirect |
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