Prediction of the evolution of defects induced by the heated implantation process: Contribution of kinetic Monte Carlo in a multi-scale modeling framework
| Autor: | Julliard, P.L., Johnsson, A., Zographos, N., Demoulin, R., Monflier, R., Jay, A., Er-Riyahi, O., Monsieur, F., Joblot, S., Deprat, F., Rideau, D., Pichler, P., Hémeryck, A., Cristiano, F. |
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| Zdroj: | In Solid State Electronics February 2023 200 |
| Databáze: | ScienceDirect |
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