Si nanowire-based micro-capacitors fabricated with metal assisted chemical etching for integrated energy storage applications
| Autor: | Hourdakis, E., Kochylas, I., Botzakaki, M.A., Xanthopoulos, N.J., Gardelis, S. |
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| Zdroj: | In Solid State Electronics October 2022 196 |
| Databáze: | ScienceDirect |
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