Parallel nanowire sensors with a high-k gate oxide for the sensitive operation in liquids
| Autor: | Popov, V.P., Tikhonenko, F.V., Antonov, V.A., Zarubanov, A.A., Gluhov, A.V., Tatarintsev, A.A., Miakonkikh, A.V., Rudenko, K.V. |
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| Zdroj: | In Solid State Electronics August 2022 194 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect