Large-scale CMOS-compatible process for silicon nanowires growth and BC8 phase formation
| Autor: | Mazzetta, I., Rigoni, F., Irrera, F., Riello, P., Quaranta, S., Latini, A., Palma, F. |
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| Zdroj: | In Solid State Electronics December 2021 186 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect