Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition
| Autor: | Jang, Yoonseo, Lee, Seung Min, Jung, Do Hwan, Yum, Jung Hwan, Larsen, Eric S., Bielawski, Christopher W., Oh, Jungwoo |
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| Zdroj: | In Solid State Electronics January 2020 163 |
| Databáze: | ScienceDirect |
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