Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer
| Autor: | Ganji, Bahram Azizollah, Sedaghat, Sedighe Babaei, Roncaglia, Alberto, Belsito, Luca |
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| Zdroj: | In Solid State Electronics October 2018 148:27-34 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect