Modeled optical properties of SiGe and Si layers compared to spectroscopic ellipsometry measurements
| Autor: | Kriso, C., Triozon, F., Delerue, C., Schneider, L., Abbate, F., Nolot, E., Rideau, D., Niquet, Y.-M., Mugny, G., Tavernier, C. |
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| Zdroj: | In Solid State Electronics March 2017 129:93-96 |
| Databáze: | ScienceDirect |
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