Impact of residual defects caused by extension ion implantation in FinFETs on parasitic resistance and its fluctuation
| Autor: | Matsukawa, Takashi, Liu, Yongxun, Mori, Takahiro, Morita, Yukinori, Otsuka, Shintaro, O'uchi, Shin-ichi, Fuketa, Hiroshi, Migita, Shinji, Masahara, Meishoku |
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| Zdroj: | In Solid State Electronics June 2017 132:103-108 |
| Databáze: | ScienceDirect |
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