TMAH-based wet surface pre-treatment for reduction of leakage current in AlGaN/GaN MIS-HEMTs

Autor: Yoon, Young Jun, Seo, Jae Hwa, Cho, Min Su, Kang, Hee-Sung, Won, Chul-Ho, Kang, In Man, Lee, Jung-Hee
Zdroj: In Solid State Electronics October 2016 124:54-57
Databáze: ScienceDirect