Ultra-thin body & buried oxide SOI substrate development and qualification for Fully Depleted SOI device with back bias capability
| Autor: | Schwarzenbach, Walter, Nguyen, Bich-Yen, Allibert, Frederic, Girard, Christophe, Maleville, Christophe |
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| Zdroj: | In Solid State Electronics March 2016 117:2-9 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect