Replacement fin processing for III–V on Si: From FinFets to nanowires
| Autor: | Waldron, Niamh, Merckling, Clement, Teugels, Lieve, Ong, Patrick, Sebaai, Farid, Barla, Kathy, Collaert, Nadine, Thean, Voon-Yew (Aaron) |
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| Zdroj: | In Solid State Electronics January 2016 115 Part B:81-91 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect