FDSOI bottom MOSFETs stability versus top transistor thermal budget featuring 3D monolithic integration
Autor: | Fenouillet-Beranger, C., Previtali, B., Batude, P., Nemouchi, F., Cassé, M., Garros, X., Tosti, L., Rambal, N., Lafond, D., Dansas, H., Pasini, L., Brunet, L., Deprat, F., Grégoire, M., Mellier, M., Vinet, M. |
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Zdroj: | In Solid State Electronics November 2015 113:2-8 |
Databáze: | ScienceDirect |
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