Reactively sputtered hafnium oxide on silicon dioxide: Structural and electrical properties
| Autor: | Kolkovsky, Vl., Lukat, K., Kurth, E., Kunath, C. |
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| Zdroj: | In Solid State Electronics April 2015 106:63-67 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Kolkovsky, Vl., Lukat, K., Kurth, E., Kunath, C. |
|---|---|
| Zdroj: | In Solid State Electronics April 2015 106:63-67 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect