Optimized design of Si-cap layer in strained-SiGe channel p-MOSFETs based on computational and experimental approaches

Autor: Sato-Iwanaga, Junko, Inoue, Akira, Sorada, Haruyuki, Takagi, Takeshi, Rothschild, Aude, Loo, Roger, Biesemans, Serge, Ito, Choshu, Liu, Yang, Dutton, Robert W., Tsuchiya, Hideaki
Zdroj: In Solid State Electronics January 2014 91:1-8
Databáze: ScienceDirect