Transistors on hybrid UTBB/Bulk substrates fabricated by local internal BOX dissolution

Autor:	Nguyen, P., Andrieu, F., Cassé, M., Tabone, C., Perreau, P., Lafond, D., Dansas, H., Tosti, L., Veytizou, C., Landru, D., Kononchuk, O., Guiot, E., Nguyen, B.-Y., Faynot, O., Poiroux, T.
Zdroj:	In Solid State Electronics December 2013 90:39-43
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect