Low-power DRAM-compatible Replacement Gate High-k/Metal Gate Stacks
| Autor: | Ritzenthaler, R., Schram, T., Bury, E., Spessot, A., Caillat, C., Srividya, V., Sebaai, F., Mitard, J., Ragnarsson, L.-Å., Groeseneken, G., Horiguchi, N., Fazan, P., Thean, A. |
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| Zdroj: | In Solid State Electronics June 2013 84:22-27 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect