Mushroom-free selective epitaxial growth of Si, SiGe and SiGe:B raised sources and drains
| Autor: | Hartmann, J.M., Benevent, V., Barnes, J.P., Veillerot, M., Lafond, D., Damlencourt, J.F., Morvan, S., Prévitali, B., Andrieu, F., Loubet, N., Dutartre, D. |
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| Zdroj: | In Solid State Electronics May 2013 83:10-17 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect