ALD high-k layer grating couplers for single and double slot on-chip SOI photonics
| Autor: | Naiini, Maziar M., Henkel, Christoph, Malm, Gunnar B., Östling, Mikael |
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| Zdroj: | In Solid State Electronics August 2012 74:58-63 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect