Study of nitrogen impact on VFB–EOT roll-off by varying interfacial SiO 2 thickness
| Autor: | Cho, Moonju, Akheyar, Amal, Aoulaiche, Marc, Degraeve, Robin, Ragnarsson, Lars-Åke, Tseng, Joshua, Hoffmann, Thomas Y., Groeseneken, Guido |
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| Zdroj: | In Solid State Electronics 2011 62(1):67-71 |
| Databáze: | ScienceDirect |
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