E-beam-evaporated Al 2O 3 for InAs/AlSb metal–oxide–semiconductor HEMT development

Autor: Lin, H.-K., Fan, D.-W., Lin, Y.-C., Chiu, P.-C., Chien, C.-Y., Li, P.-W., Chyi, J.-I., Ko, C.-H., Kuan, T.-M., Hsieh, M.-K., Lee, W.-C., Wann, C.H.
Zdroj: In Solid State Electronics 2010 54(5):505-508
Databáze: ScienceDirect