Impact of the gate stack on the electrical performances of 3D multi-channel MOSFET (MCFET) on SOI

Autor: Bernard, Emilie, Ernst, T., Guillaumot, B., Vulliet, N., Garros, X., Maffini-Alvaro, V., Coronel, P., Skotnicki, T., Deleonibus, S.
Zdroj: In Solid State Electronics September 2008 52(9):1297-1302
Databáze: ScienceDirect