Role of hydrogen in excimer laser annealing of hydrogen-modulation doped a-Si film
| Autor: | Heya, Akira, Matsuo, Naoto, Serikawa, Tadashi, Kawamoto, Naoya |
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| Zdroj: | In Solid State Electronics 2008 52(3):381-387 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Heya, Akira, Matsuo, Naoto, Serikawa, Tadashi, Kawamoto, Naoya |
|---|---|
| Zdroj: | In Solid State Electronics 2008 52(3):381-387 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect