MEMS on cavity-SOI wafers
| Autor: | Luoto, Hannu, Henttinen, Kimmo, Suni, Tommi, Dekker, James, Mäkinen, Jari, Torkkeli, Altti |
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| Zdroj: | In Solid State Electronics 2007 51(2):328-332 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Luoto, Hannu, Henttinen, Kimmo, Suni, Tommi, Dekker, James, Mäkinen, Jari, Torkkeli, Altti |
|---|---|
| Zdroj: | In Solid State Electronics 2007 51(2):328-332 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect