Sensors and actuators based on SOI materials
| Autor: | Sanz-Velasco, Anke, Nafari, Alexandra, Rödjegård, Henrik, Bring, Martin, Hedsten, Karin, Enoksson, Peter, Bengtsson, Stefan |
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| Zdroj: | In Solid State Electronics May 2006 50(5):865-876 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect