Electrical characterization of 12 nm EJ-MOSFETs on SOI substrates

Autor: Henschel, W., Wahlbrink, T., Georgiev, Y.M., Lemme, M., Mollenhauer, T., Vratzov, B., Fuchs, A., Kurz, H., Kittler, M., Schwierz, F.
Zdroj: In Solid State Electronics 2004 48(5):739-745
Databáze: ScienceDirect