A novel fabrication process for polysilicon thin film transistors with source/drain contacts formed by deposition and lift-off of highly doped layers
| Autor: | Cuscunà, M, Bonfiglietti, A, Carluccio, R, Mariucci, L, Mecarini, F, Pecora, A, Stanizzi, M, Valletta, A, Fortunato, G |
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| Zdroj: | In Solid State Electronics 2002 46(9):1351-1358 |
| Databáze: | ScienceDirect |
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