Study of porous silicon, silicon carbide and DLC coated field emitters for pressure sensor application
Autor: | Kleps, Irina, Angelescu, Anca, Samfirescu, Narcis, Gil, Adriana, Correia, Antonio |
---|---|
Zdroj: | In Solid State Electronics 2001 45(6):997-1001 |
Databáze: | ScienceDirect |
Externí odkaz: |