Tantalum pentoxide obtained from TaNx and TaSi2 anodisation: an inexpensive and thermally stable high k dielectric
| Autor: | Dueñas, S., Castán, E., Barbolla, J., Kola, R.R., Sullivan, P.A. |
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| Zdroj: | In Solid State Electronics August 2001 45(8):1441-1450 |
| Databáze: | ScienceDirect |
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