Silicon shallow doping by erbium and oxygen recoils implantation
| Autor: | Feklistov, K.V., Cherkov, A.G., Popov, V.P. |
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| Zdroj: | In Solid State Communications September 2016 242:41-45 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Feklistov, K.V., Cherkov, A.G., Popov, V.P. |
|---|---|
| Zdroj: | In Solid State Communications September 2016 242:41-45 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect