Correlation between microstructure and properties of hydrogenated Si thin films grown by plasma enhanced chemical vapor deposition under different hydrogen flow rates
| Autor: | Amor, Sana Ben, Bousbih, Rabaa, Ouertani, Rachid, Dimassi, Wissem, Ezzaouia, Hatem |
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| Zdroj: | In Solar Energy May 2014 103:12-18 |
| Databáze: | ScienceDirect |
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