Modeling and experiments of microcrystalline silicon film deposited via VHF-PECVD
| Autor: | Chen, Yongsheng, Chen, Xiping, Jiao, Yuechao, Hao, Xiuli, Lu, Jingxiao, Yang, Shi-e |
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| Zdroj: | In Solar Energy August 2013 94:155-161 |
| Databáze: | ScienceDirect |
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