Investigation of the impact of optical glass composition on ceria slurry stability during chemical mechanical polishing process
| Autor: | Abbas, Farouq, Belkhir, Nabil, Herrmann, Andreas, Rädlein, Edda |
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| Zdroj: | In Powder Technology 1 December 2024 448 |
| Databáze: | ScienceDirect |
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