Fabrication of 53.2 nm pitch self-traceable gratings by laser-focused atomic deposition combined with extreme ultraviolet interference lithography
| Autor: | Tang, Zhaohui, Zhao, Jun, Deng, Xiao, Tan, Wen, Wu, Yanqing, Tai, Renzhong, Cheng, Xinbin, Li, Tongbao |
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| Zdroj: | In Optik May 2023 279 |
| Databáze: | ScienceDirect |
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