High-accuracy spectral interferometer with multi-Fabry–Perot Etalon for thickness measurement of the silicon wafer
| Autor: | Chen, Meiyun, Pang, Shuiling, Zhou, Jinglun, Wu, Heng, Hirokazu, Matsumoto, Kiyoshi, Takamasu |
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| Zdroj: | In Optics Communications 15 December 2021 501 |
| Databáze: | ScienceDirect |
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