Metrology of non-thermal capacitively coupled N2–Ar mixture plasma
Autor: | Rehman, N.U., Anjum, Z., Masood, A., Farooq, M., Ahmad, I., Zakaullah, M. |
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Zdroj: | In Optics Communications 1 June 2013 296:72-78 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Rehman, N.U., Anjum, Z., Masood, A., Farooq, M., Ahmad, I., Zakaullah, M. |
---|---|
Zdroj: | In Optics Communications 1 June 2013 296:72-78 |
Databáze: | ScienceDirect |
Externí odkaz: |