Flexible coherent diffraction lithography by tunable phase arrays in lithium niobate crystals
| Autor: | Paturzo, M., Grilli, S., Mailis, S., Coppola, G., Iodice, M., Gioffré, M., Ferraro, P. |
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| Zdroj: | In Optics Communications 15 April 2008 281(8):1950-1953 |
| Databáze: | ScienceDirect |
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