Multi-physics field coupling analysis of in-situ laser-assisted micro-imprinting of micro tapered holes
| Autor: | Meng, Siwei, Shi, Guangfeng, Jiang, Ziwei, Lv, Hongbing |
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| Zdroj: | In Optics and Laser Technology February 2025 181 Part A |
| Databáze: | ScienceDirect |
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